Tantalum Oxide And Ge-Incorporated Tantalum Oxide Prepared By Pulsed Laser Deposition For High-K Dielectric Applications

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Author

Hsu, Po-ya

Date Issued

2014-08-18

Keywords

•

Committee Chair

Van Dover, Robert B.

Committee Member

Umbach, Christopher Cutler

Degree Discipline

Materials Science and Engineering

Degree Name

M.S., Materials Science and Engineering

Degree Level

Master of Science

Type

dissertation or thesis