Atomic layer deposition for mechanical, magnetic, and robotic systems
Loading...
No Access Until
Permanent Link(s)
Collections
Other Titles
Authors
Abstract
The Japanese paper arts origami and kirigami have revolutionized design of three-dimensional structures, metamaterials, and robots from planar materials. The design principles in these art forms are especially valuable for small systems because most nanofabrication involves lithographic patterning of planar substrates. In this thesis, we build upon efforts to bring these paper art forms to materials with a characteristic thickness on the scale of nanometers. We employ atomic layer deposition to synthesize films as thin as 2 nm and employ these films to create mechanical metamaterials, self-folding machines, and magnetic microbots. We begin this endeavor by developing fabrication methods to produce free-standing ALD films that are capable of integration with with complex nanofabrication processes. We employ these techniques to characterize the out-of-plane mechanical properties of ultra-thin films of inorganic metal oxides and metals. We build upon these results and fabricate mechanical metamaterials and magnetic mechanisms that exhibit emergent properties dictated by their geometries. In addition, we demonstrate that combinations of ALD materials form a versatile platform to achieve self-folding structures at the micron scale. Self-folding is then employed to produce electronically integrated robotics. Finally, we explore magnetically encoded microrobots, unifying the worlds of magnetic information storage and micromechanical systems.
Journal / Series
Volume & Issue
Description
163 pages
Sponsorship
Date Issued
2020-08
Publisher
Keywords
Atomic layer deposition; Fabrication; MEMS; Microrobotics; Origami; Robotics
Location
Effective Date
Expiration Date
Sector
Employer
Union
Union Local
NAICS
Number of Workers
Committee Chair
McEuen, Paul L.
Committee Co-Chair
Committee Member
Xing, H. Grace
Kourkoutis, Lena F.
Kourkoutis, Lena F.
Degree Discipline
Applied Physics
Degree Name
Ph. D., Applied Physics
Degree Level
Doctor of Philosophy
Related Version
Related DOI
Related To
Related Part
Based on Related Item
Has Other Format(s)
Part of Related Item
Related To
Related Publication(s)
Link(s) to Related Publication(s)
References
Link(s) to Reference(s)
Previously Published As
Government Document
ISBN
ISMN
ISSN
Other Identifiers
Rights
Attribution-NoDerivatives 4.0 International
Types
dissertation or thesis