Design, Analysis And Simulation Of Microscale Solid-Wave Gyroscopes
Files
No Access Until
Permanent Link(s)
Collections
Other Titles
Author(s)
Abstract
In this thesis, we focus on MEMS solid-wave gyroscopes operated in rateintegrating mode. In parallel to the miniaturization efforts of shell-type resonators, we address design and fabrication problems by analysis and simulation. We investigate vibrations of axisymmetric resonators using a shell theory and 2.5D elasticity. We employ classical finite element method and spectral methods. We describe effects of geometric imperfections on gyroscope dynamics and use mode-coupling to model vibration sensitivity. We also detail computations of temperature sensitivities of gyroscope parameters. We then formulate and solve example shape optimization problems based on these analyses. Lastly, we introduce thermomechanical noise squeezing to reduce angle random walk.
Journal / Series
Volume & Issue
Description
Sponsorship
Date Issued
Publisher
Keywords
Location
Effective Date
Expiration Date
Sector
Employer
Union
Union Local
NAICS
Number of Workers
Committee Chair
Committee Co-Chair
Committee Member
Wang,Zheng Jane