eCommons

 

Design, Analysis And Simulation Of Microscale Solid-Wave Gyroscopes

Other Titles

Abstract

In this thesis, we focus on MEMS solid-wave gyroscopes operated in rateintegrating mode. In parallel to the miniaturization efforts of shell-type resonators, we address design and fabrication problems by analysis and simulation. We investigate vibrations of axisymmetric resonators using a shell theory and 2.5D elasticity. We employ classical finite element method and spectral methods. We describe effects of geometric imperfections on gyroscope dynamics and use mode-coupling to model vibration sensitivity. We also detail computations of temperature sensitivities of gyroscope parameters. We then formulate and solve example shape optimization problems based on these analyses. Lastly, we introduce thermomechanical noise squeezing to reduce angle random walk.

Journal / Series

Volume & Issue

Description

Sponsorship

Date Issued

2016-05-29

Publisher

Keywords

mems; gyroscope; rate-integrating

Location

Effective Date

Expiration Date

Sector

Employer

Union

Union Local

NAICS

Number of Workers

Committee Chair

Lovelace,Richard V E

Committee Co-Chair

Committee Member

Bindel,David S.
Wang,Zheng Jane

Degree Discipline

Applied Physics

Degree Name

Ph. D., Applied Physics

Degree Level

Doctor of Philosophy

Related Version

Related DOI

Related To

Related Part

Based on Related Item

Has Other Format(s)

Part of Related Item

Related To

Related Publication(s)

Link(s) to Related Publication(s)

References

Link(s) to Reference(s)

Previously Published As

Government Document

ISBN

ISMN

ISSN

Other Identifiers

Rights

Rights URI

Types

dissertation or thesis

Accessibility Feature

Accessibility Hazard

Accessibility Summary

Link(s) to Catalog Record