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  4. DESIGN, FABRICATION, AND CHARACTERIZATION OF ALN/GAN/ALN HIGH-ELECTRON-MOBILITY TRANSISTORS

DESIGN, FABRICATION, AND CHARACTERIZATION OF ALN/GAN/ALN HIGH-ELECTRON-MOBILITY TRANSISTORS

File(s)
Hickman_cornellgrad_0058F_12751.pdf (27.41 MB)
Permanent Link(s)
https://doi.org/10.7298/803y-j898
https://hdl.handle.net/1813/110922
Collections
Cornell Theses and Dissertations
Author
Hickman, Austin
Abstract

Gallium nitride high-electron-mobility transistors (GaN HEMTs) are at a point of rapid growth in defense (radar, SATCOM) and commercial (5G and beyond) industries. This thesis explores the aluminum nitride (AlN) platform as a candidate for future high-power, millimeter-wave (mm-wave) power am- plifiers. The AlN platform allows for optimized, highly-scaled heterostructure design with the potential for improved output power and thermal management of III-nitride amplifiers.The thesis begins with an overview of the GaN amplifier landscape, before focusing on the AlN/GaN/AlN heterostructure, laying out its advantages over the conventional and state-of-the-art GaN HEMT heterostructures. A robust large signal model, based on the Angelov model, is demonstrated and verified over the gigahertz frequencies. AlN/GaN/AlN HEMT results are explored, beginning with the measured breakdown characteristics before moving to the large signal performance of the HEMT at mm-wave frequencies. Development of and motivation for regrown ohmic contacts, T-gate contacts, and silicon ni- tride passivation are also covered. In addition to the n-channel amplifier, the progress of state-of-the-art high- current p-channel FETs, mature AlN bulk acoustic wave (BAW) filter technol- ogy, and advanced substrate-integrated waveguides (SIW), are discussed. The integration of all these components on a unifying AlN platform will unlock unprecedented integration in the III-nitride regime, with the potential for a new wave of innovation in mm-wave communication and high-power logic applica- tions.

Description
185 pages
Date Issued
2021-08
Keywords
Aluminum Nitride
•
high-power amplifier
•
millimeter-wave
Committee Chair
Jena, Debdeep
Committee Member
Molnar, Alyosha
Xing, Huili
Apsel, Alyssa
Degree Discipline
Electrical and Computer Engineering
Degree Name
Ph. D., Electrical and Computer Engineering
Degree Level
Doctor of Philosophy
Rights
Attribution 4.0 International
Rights URI
https://creativecommons.org/licenses/by/4.0/
Type
dissertation or thesis
Link(s) to Catalog Record
https://newcatalog.library.cornell.edu/catalog/

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