Reticle management analysis for the photolithography sector of a semiconductor fabrication facility
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Author
Chen, R.
Goh, L.
Koh, K.
Roundy, R.
Wang, A.
Zhao, D.
Abstract
Reticle management analysis for the photolithography sector of a semiconductor fabrication facility
Date Issued
2000-06
Publisher
Cornell University Operations Research and Industrial Engineering
Keywords
Previously Published as
1263
Type
technical report