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  5. Engineering: Cornell Quarterly, Vol.18, No.1/2 (Spring 1983): Discovery of the Submicron Domain

Engineering: Cornell Quarterly, Vol.18, No.1/2 (Spring 1983): Discovery of the Submicron Domain

File(s)
1983_v18_n1_2.pdf (43.55 MB)
Permanent Link(s)
https://hdl.handle.net/1813/2424
Collections
Engineering Quarterly
Richardson, Robert Coleman
Author
Wolf, Edward D.
Rettig, Hillary
Rodriguez, Ferdinand
Isaacson, Michael S.
Siegel, Benjamin M.
Lewis, Aaron
Ashcroft, Neil W.
Richardson, Robert C.
Abstract

IN THIS ISSUE: Discovery in a New Domain: Research at the National Submicron Facility /2 Edward D. Wolf ... A Walking Tour of Knight Laboratory /7 Hillary Rettig ... Using the Submicron Facility: A Unique Opportunity for Researchers Throughout the United States /15 ... Improved Polymers for Advanced Lithography /19 Ferdinand Rodriguez ... Microstructures and Materials Science at the National Submicron Facility /23 ... Electrons, Ions, and Photons in Submicron Research: 1. Nanolithography with Electron Beams /28 Michael S. Isaacson ... 2. Ion Beams for Very-High-Re solution Lithography /33 Benjamin M. Siegel ... 3. Light Transmission Through Submicron Apertures /36 Aaron Lewis and Michael S. Isaacson ... Microphysics for the Future : 1. Periodic Submicron Structures /41 Neil W. Ashcroft ... 2. Submicron Structures at Very Low Temperatures /44 Robert C. Richardson ... Register /47 .... Vantage /53 ... Faculty Publications /59 ... Letters /64

Date Issued
1983
Publisher
Internet-First University Press
Keywords
Engineering
•
Cornell University
•
Submicrons
•
Microstructures
•
Materials Science
•
Electrons, Ions, and Photons
•
Nanolithography
•
Microphysics
Type
periodical

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