Randomness and dependence in etch process and their effects on predictability of failures and on cycle times $infty$> input fluid queues
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Author
Resnick, S.
Samorodnitsky, G.
Xue, F.
Abstract
Randomness and dependence in etch process and their effects on predictability of failures and on cycle times $infty$> input fluid queues
Date Issued
1999-05
Publisher
Cornell University Operations Research and Industrial Engineering
Keywords
Previously Published as
1241
Type
technical report