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  4. HETEROGENOUS INTEGRATION FOR CELL-SIZED INTEGRATED SYSTEMS

HETEROGENOUS INTEGRATION FOR CELL-SIZED INTEGRATED SYSTEMS

File(s)
Ji_cornellgrad_0058F_13810.pdf (50.11 MB)
Permanent Link(s)
https://doi.org/10.7298/6aaq-cr06
https://hdl.handle.net/1813/114665
Collections
Cornell Theses and Dissertations
Author
Ji, Yanxin
Abstract

In this thesis, we introduce the concept of cell-sized integrated systems. These systems are created by integrating dissimilar micro-devices, offering diverse functionalities akin to those of macro-scale systems but scaled down to the size of a single cell. The two primary types of cell-sized integrated systems are micro neural implants and omni-enviro autonomous micro-robots, creating both of which face distinct challenges. The creation of micro-neural implants is limited by constraints in manufacturing technology, requiring a universal method to combine various functional microscale devices. The challenge in developing omni-enviro autonomous microrobots lies in the absence of certain components: high-efficiency micro-actuators that can operate in all environments. In this work, I will demonstrate how we overcome these challenges by introducing a heterogeneous integration method for combining disparate microscale devices, and by developing a new type of micro-actuator. After addressing these challenges, I will showcase our advancements towards the goals of creating micro neural implants and autonomous microrobots.

Description
135 pages
Date Issued
2023-08
Committee Chair
McEuen, Paul
Committee Member
Jena, Debdeep
Fuchs, Gregory
Degree Discipline
Electrical and Computer Engineering
Degree Name
Ph. D., Electrical and Computer Engineering
Degree Level
Doctor of Philosophy
Type
dissertation or thesis
Link(s) to Catalog Record
https://newcatalog.library.cornell.edu/catalog/16219409

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