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  4. A Systematic Investigation of the Epitaxial Stabilization of Metastable Alpha-Gallium Oxide Thin Films on R-Plane Sapphire Substrates Grown via MOCVD

A Systematic Investigation of the Epitaxial Stabilization of Metastable Alpha-Gallium Oxide Thin Films on R-Plane Sapphire Substrates Grown via MOCVD

File(s)
Lee_cornell_0058O_12248.pdf (7.74 MB)
Permanent Link(s)
https://doi.org/10.7298/b6sf-hc24
https://hdl.handle.net/1813/116295
Collections
Cornell Theses and Dissertations
Author
Lee, Cheng-Han
Abstract

The ultra-wide bandgap semiconductor material α-Ga2O3 exhibits promising potential for applications in next-generation high-power electronics and deep-ultraviolet photodetectors. Its ultra-wide bandgap of 5.3 eV enables a high breakdown voltage and a potentially high Baliga’s figure of merit, while its rhombohedral corundum structure allows heteroepitaxy of α-Ga2O3 on inexpensive, isostructural sapphire substrates. The metastable nature of α-Ga2O3, however, results in a strong tendency for the films to revert back to the thermodynamically stable monoclinic β-Ga2O3 phase when grown beyond a critical thickness. Synthesizing thick, phase-pure α-Ga2O3 heteroepitaxial films with high crystallinity on sapphire substrates via metal-organic chemical vapor deposition (MOCVD) has proven to be a major challenge. This gives rise to the natural question: Can epitaxial growth of single-phase α-Ga2O3 with high crystalline quality be achieved via MOCVD, how does the critical thickness for phase transition of α-Ga2O3 depend on growth parameters, and what is the phase stabilization mechanism for α-Ga2O3 thin films grown by MOCVD? In this study, for the first time, we performed a systematic investigation on the stabilization of α-Ga2O3 on (10¯12) r-plane sapphire via MOCVD. An optimal growth window was identified at a reactor pressure of 15 Torr and substrate temperature of 575 ℃. The significance of O2 to alkyl molar ratio, as a growth parameter, and the introduction of an α-Ga2O3 nucleation layer deposited at a low growth rate were further elucidated in this work. These synthesis parameters were shown to play a substantial role in enhancing the phase purity, crystal quality, as well as increasing the critical thickness for phase transition of MOCVD-grown α-Ga2O3 thin films. Under the optimized growth conditions, we have demonstrated one of the lowest rocking curve full-width at half-maximum value ~ 1174 arcsec and the highest thickness ~ 1 μm ever reported on α-Ga2O3 heteroepitaxial thin films grown via MOCVD on r-plane sapphire substrates. Furthermore, we reveal that nucleated Ga2O3 with small grain size grown under high vapor supersaturation is key for stabilizing the α-phase in MOCVD. Based on the observation, we propose a strain-induced epitaxial stabilization mechanism for MOCVD-grown α-Ga2O3 films. Collectively, this study helped established an optimal MOCVD growth regime for α-Ga2O3 with high crystallinity comparable to conductive thin films grown by mist-chemical vapor deposition and pulsed laser deposition, paving the way for future work on controllable n-type doping of α-Ga2O3 films via MOCVD and the realization of α-Ga2O3-based electronic and optoelectronic devices.

Description
87 pages
Date Issued
2024-08
Keywords
Alpha-Gallium Oxide
•
Epitaxy
•
High-Power Electronics
•
Metal-Organic Chemical Vapor Deposition
•
Thin Films
•
Ultra-Wide Bandgap Semiconductor
Committee Chair
Nair, Hari
Committee Member
Jena, Debdeep
Degree Discipline
Materials Science and Engineering
Degree Name
M.S., Materials Science and Engineering
Degree Level
Master of Science
Type
dissertation or thesis
Link(s) to Catalog Record
https://newcatalog.library.cornell.edu/catalog/16611781

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