This study evaluated the efficacy of superheated steam (SHS) as a dry sanitation method for microbial inactivation within difficult-to-clean sites. Surface temperature analysis revealed that temperatures increased with decreasing test cell depth and shorter nozzle- surface distances, although deviations were noted in the smallest test cell due to variations in crevice dimensions and cell thickness. Microbial inactivation required SHS exposure times longer than 5 minutes to achieve a 5-log reduction, with a maximum reduction of 8.55 ± 0.43 log10 CFU/mL observed after 7 minutes SHS exposure in a 1 cm depth test cell. Shorter exposures (<60 seconds) failed to achieve any microbial reduction across all test cell depths. While SHS demonstrates potential as a novel dry sanitation method, its practical application is hindered by the need for extended exposure times and precise targeting. Future work should address these limitations to improve its industrial feasibility.