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  4. TOWARD III-NITRIDE BASED FERROELECTRIC HIGH ELECTRON MOBILITY TRANSISTORS

TOWARD III-NITRIDE BASED FERROELECTRIC HIGH ELECTRON MOBILITY TRANSISTORS

File(s)
Lee_cornellgrad_0058F_13107.pdf (12.56 MB)
Permanent Link(s)
https://doi.org/10.7298/18rh-4r83
https://hdl.handle.net/1813/111986
Collections
Cornell Theses and Dissertations
Author
Lee, Hyunjea
Abstract

With growing needs for data-centric applications such as edge intelligence in recent years, the semiconductor industry has been actively looking for new computing hardware that involves high-speed and energy-efficient data processing solutions. Innovation in memory is critical in resolving the speed mismatch between memory and logic present in von Neumann-based computing architectures. Moving toward near-memory or in-memory computing architectures, which enable efficient data transfer between logic cores and memories, embedded non-volatile memories are arising as a strong candidate for dataintensive applications. In this work, ferroelectric field-effect transistors (FeFETs) are investigated as a memory element for such new computing platforms. The recent discovery of a ferroelectric nitride, ScAlN, shed light on the epitaxial nitride-based FeFET solution. Possessing several advantages for FeFET-based memories, ScAlN has the potential to outperform the widely-investigated Hf0.5Zr0.5O2. The MBE-grown ScAlN exhibits ferroelectric properties that are highly desirable for achieving a sufficient memory window at reasonable operating voltages. The high-quality epitaxial interfaces are expected to help mitigate charge trapping issues reported in Hf0.5Zr0.5O2-based FeFETs. This work aims to manifest the advantages of ScAlN for FeFETs compared with other ferroelectric options and to demonstrate experimental efforts toward the III-nitride FeFETs. An Analytical FeFET model is used to simulate and compare the figures of merit of FeFETs based on various ferroelectrics. ScAlN, grown by reactive co-sputtering and MBE, is fabricated into capacitors and field-effect transistors (FETs), and the electrical properties of the devices are investigated. Despite some challenges in the growth and fabrication of the recent generation, ScAlN shows the potential as a high-k dielectric barrier for FETs and is expected to add a ferroelectric functionality to the III-nitride platform.

Description
143 pages
Date Issued
2022-08
Committee Chair
Xing, H. Grace
Committee Member
Jena, Debdeep
Molnar, Alyosha Christopher
Degree Discipline
Electrical and Computer Engineering
Degree Name
Ph. D., Electrical and Computer Engineering
Degree Level
Doctor of Philosophy
Type
dissertation or thesis
Link(s) to Catalog Record
https://newcatalog.library.cornell.edu/catalog/15578795

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