Magnetic resonance force microscopy (MRFM) is a scanned probe technique that detects spin magnetization as a force or force gradient exerted between a magnet-tipped micro-cantilever and nuclear or electron spins in a thin-film sample in vacuum at cryogenic temperatures. By detecting magnetic resonance mechanically, MRFM combines the sensitivity of scanning probe microscopy with the isotopic specificity of magnetic resonance. To further increase sensitivity and achieve high-resolution single molecule magnetic resonance imaging, highly polarized nuclear spins can be created via dynamic nuclear polarization. In this thesis, we discuss the fabrication of high-sensitivity cantilevers with integrated nano-magnets and micrometer-scale coplanar waveguides operating from dc to 40 GHz. These technical advancements enable two exciting experiments: (1) the measurement of electric field and field gradient noise over a metal at nanoscale distances over a broad temperature range and (2) the first achievement of microwave-induced nuclear spin hyperpolarization in a nanoscale magnetic resonance experiment. First, we report our efforts to reproduce a batch and-serial fabrication protocol of high-gradient nanomagnets on cantilevers for scanned probe detection. We then extend the electron-beam lithography-based protocol to fabricate 50 nm wide cobalt nanomagnets suitable for use in a magnetic resonance force microscope. The anticipated factor of four increase in tip-field gradient as a result of size reduction is expected to translate into a 256-fold reduction in acquisition time in the polarized-spin limit. Second, we study non-contact friction experienced by a magnet-tipped cantilever near a metal surface at room temperature and 77 K. We study cantilever surface dissipation and frequency noise as a function of temperature, tip-sample separation, the composition of the conductive surface, and the applied tip-bias voltage. We find that the force noise follows a power law as a function of tip-sample separation and is mainly independent of the metal surfaces studied here. Finally, we design, fabricate, and characterize micron-scale coplanar waveguides that are then coupled to a 36 GHz chip-scale CMOS microwave source. We report the successful operation of the chip-scale 36 GHz source in vacuum at temperatures down to 12 K. This finding is a promising prospect for using the microwave source to excite electron spin resonance and initiate DNP in an individual biomolecule with an attached nitroxide spin label. Overall, the work described in this thesis opens up new avenues for pushing magnetic resonance imaging to nanometer resolution, where single molecule imaging becomes more feasible.