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  5. Engineering: Cornell Quarterly, Vol.18, No.3 (Spring 1983-84): Key to New Technologies

Engineering: Cornell Quarterly, Vol.18, No.3 (Spring 1983-84): Key to New Technologies

File(s)
1983_v18_n3.pdf (35.36 MB)
Permanent Link(s)
https://hdl.handle.net/1813/2425
Collections
Engineering Quarterly
Author
Everhart, Thomas E.
Krusius, J. Peter
Frey, Jeffrey
Wolf, Edward D.
Adesida, Ilesanmi
Eastman, Lester F.
Sonek, Gregory J.
Ballantyne, Joseph M.
Buhrman, Robert A.
Abstract

IN THIS ISSUE: Submicron Structures: A Microcosm of Modern Engineering /2 Thomas E. Everhart ... Ultrasmall Features: Key to the Future Development of VLSI Technology /7 J. Peter Krusius ... Small-Scale Physics for Large-Scale Electronic Circuits /12 Jeffrey Frey ... Dry Processing: New Techniques for Etching Submicrometer Structures /16 Edward D. Wolf and Ilesanmi Adesida ... New Techniques for Growing Compound Semiconductors /20 Lester F. Eastman ... Microfabrication for Guided Wave Optics /28 Gregory J. Sonek and Joseph M. Ballantyne ... Superconductors in Microstructures /32 Robert A. Buhrman ... Multidisciplinary Research: Key to Progress at NRRFSS /37 ... Register /41 ... Faculty Publications /49

Date Issued
1983
Publisher
Internet-First University Press
Keywords
Engineering
•
Cornell University
•
Submicrons
•
Microstructures
•
Materials Science
•
Electrons, Ions, and Photons
•
Nanolithography
•
Microphysics
Type
periodical

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