Engineering: Cornell Quarterly, Vol.18, No.3 (Spring 1983-84): Key to New Technologies
IN THIS ISSUE: Submicron Structures: A Microcosm of Modern Engineering /2 Thomas E. Everhart ... Ultrasmall Features: Key to the Future Development of VLSI Technology /7 J. Peter Krusius ... Small-Scale Physics for Large-Scale Electronic Circuits /12 Jeffrey Frey ... Dry Processing: New Techniques for Etching Submicrometer Structures /16 Edward D. Wolf and Ilesanmi Adesida ... New Techniques for Growing Compound Semiconductors /20 Lester F. Eastman ... Microfabrication for Guided Wave Optics /28 Gregory J. Sonek and Joseph M. Ballantyne ... Superconductors in Microstructures /32 Robert A. Buhrman ... Multidisciplinary Research: Key to Progress at NRRFSS /37 ... Register /41 ... Faculty Publications /49