Metal oxides such as TiO2 and ZnO have been used extensively in the paint, cosmetics, and coating industries; however, these metal oxides are both photoactive and susceptible to surface contamination from formic and acetic acid when exposed to air. Surface fluorination of rutile (110) has been found to be effective in passivating the rutile (110) surface. This dissertation presents a simple method of TiO2(110) fluorination that involves the photoreaction of benzoate-terminated rutile (110) with O2 (g) in the presence of xenon difluoride XeF2 (g) as a fluorinating agent. The F-TiO2 (110) surfaces were characterized with scanning tunneling microscopy (STM) and X-ray photoelectron spectroscopy (XPS).