Cornell University
Library
Cornell UniversityLibrary

eCommons

Help
Log In(current)
  1. Home
  2. Cornell University Graduate School
  3. Cornell Theses and Dissertations
  4. Synchronization in Coupled Opto-thermal Silicon MEMS Limit Cycle Oscillators

Synchronization in Coupled Opto-thermal Silicon MEMS Limit Cycle Oscillators

File(s)
Bhaskar_cornellgrad_0058F_13245.pdf (55.1 MB)
Permanent Link(s)
https://doi.org/10.7298/30rw-de48
https://hdl.handle.net/1813/111920
Collections
Cornell Theses and Dissertations
Author
Bhaskar, Aditya
Abstract

Micro- and nano-scale oscillators exhibit nonlinear phenomena such as limit cycle oscillations, self-synchronization, and frequency entrainment to an external drive. In this work, we chart the behavior of silicon MEMS oscillators that are nominally 40 µm long and 205 nm thick, mechanically coupled, and opto-thermally driven by a continuous-wave helium-neon laser. Experimentally, we demonstrate synchronization in pairs of coupled oscillators which result in reduced frequency fluctuations in the devices. Irregular oscillations are observed at higher input laser powers and are explained by the existence of bistable states and sensitive dependence on initial conditions in the corresponding lumped-parameter mathematical model. The key parameters studied in this work are frequency detuning, coupling level, and the input laser power. Using numerical and analytical perturbation methods, we extend the analysis to an array of eight coupled oscillators and study self-synchronization and frequency entrainment to an external inertial drive. Key contributions include the mapping of the dynamical behavior of clamped-clamped silicon structures widely used in MEMS sensors, actuators, and time-keeping devices, and the use of a third-order model to give numerical and theoretical boundaries for self-synchronization, entrainment, and bistability.

Description
138 pages
Date Issued
2022-08
Keywords
Continuous-wave laser
•
Frequency detuning
•
Linear coupling
•
Microelectromechanical systems
•
Nonlinear dynamics
•
Synchronization
Committee Chair
Zehnder, Alan Taylor
Committee Member
McLaskey, Greg
Rand, Richard Herbert
Degree Discipline
Theoretical and Applied Mechanics
Degree Name
Ph. D., Theoretical and Applied Mechanics
Degree Level
Doctor of Philosophy
Rights
Attribution 4.0 International
Rights URI
https://creativecommons.org/licenses/by/4.0/
Type
dissertation or thesis
Link(s) to Catalog Record
https://newcatalog.library.cornell.edu/catalog/15578732

Site Statistics | Help

About eCommons | Policies | Terms of use | Contact Us

copyright © 2002-2026 Cornell University Library | Privacy | Web Accessibility Assistance