Goblits To Omg: 3D Fabrication Techniques For An Opto-Mechanical Gyroscope
Loading...
Files
No Access Until
Permanent Link(s)
Collections
Other Titles
Author(s)
Abstract
The scope of this dissertation is to discuss the concept and design considerations of a micro-scale mass manufacturable opto-mechanical gyroscope, as well as the considerable fabrication challenges faced in creating a mass manufacturable hemispherical shell resonator that meets all required design constraints. Intensive studies of HNA isotropic etching of Si, and alternative masking schemes were undertaken to reduce anisotropy and roughness. Dopant Enhanced Oxidation schemes are discussed, and toroidal-lip silicon oxide devices for improved optical quality factor are fabricated. Optical sensing of mechanical resonances is seen in air, and verified with Laser Doppler Vibrometry (LDV).
Journal / Series
Volume & Issue
Description
Sponsorship
Date Issued
2014-01-27
Publisher
Keywords
Gyroscope; 3D; MEMS
Location
Effective Date
Expiration Date
Sector
Employer
Union
Union Local
NAICS
Number of Workers
Committee Chair
Bhave, Sunil A.
Committee Co-Chair
Committee Member
Pollock, Clifford Raymond
Bindel, David S.
Bindel, David S.
Degree Discipline
Electrical Engineering
Degree Name
Ph. D., Electrical Engineering
Degree Level
Doctor of Philosophy
Related Version
Related DOI
Related To
Related Part
Based on Related Item
Has Other Format(s)
Part of Related Item
Related To
Related Publication(s)
Link(s) to Related Publication(s)
References
Link(s) to Reference(s)
Previously Published As
Government Document
ISBN
ISMN
ISSN
Other Identifiers
Rights
Rights URI
Types
dissertation or thesis