Tantalum Oxide And Ge-Incorporated Tantalum Oxide Prepared By Pulsed Laser Deposition For High-K Dielectric Applications

Hsu, Po-ya2015-01-072019-08-192014-08-18bibid: 8793432https://hdl.handle.net/1813/38900en-USPLDTantalum oxideTantalum Oxide And Ge-Incorporated Tantalum Oxide Prepared By Pulsed Laser Deposition For High-K Dielectric Applicationsdissertation or thesis