2026-09-19T12:45:47Zhttps://ecommons.cornell.edu/server/oai/requestoai:ecommons.cornell.edu:1813/1119202026-05-15T19:47:03Zcom_1813_35col_1813_47
Bhaskar, Aditya
Zehnder, Alan Taylor
McLaskey, Greg
Rand, Richard Herbert
2022-10-31T16:19:47Z
2022-10-31T16:19:47Z
2022-08
ProQuest Submission ID: 13245
ProQuest Publication ID: 29322794
https://hdl.handle.net/1813/111920
https://doi.org/10.7298/30rw-de48
15578732
138 pages
Micro- and nano-scale oscillators exhibit nonlinear phenomena such as limit cycle oscillations, self-synchronization, and frequency entrainment to an external drive. In this work, we chart the behavior of silicon MEMS oscillators that are nominally 40 µm long and 205 nm thick, mechanically coupled, and opto-thermally driven by a continuous-wave helium-neon laser. Experimentally, we demonstrate synchronization in pairs of coupled oscillators which result in reduced frequency fluctuations in the devices. Irregular oscillations are observed at higher input laser powers and are explained by the existence of bistable states and sensitive dependence on initial conditions in the corresponding lumped-parameter mathematical model. The key parameters studied in this work are frequency detuning, coupling level, and the input laser power. Using numerical and analytical perturbation methods, we extend the analysis to an array of eight coupled oscillators and study self-synchronization and frequency entrainment to an external inertial drive. Key contributions include the mapping of the dynamical behavior of clamped-clamped silicon structures widely used in MEMS sensors, actuators, and time-keeping devices, and the use of a third-order model to give numerical and theoretical boundaries for self-synchronization, entrainment, and bistability.
en
Attribution 4.0 International
https://creativecommons.org/licenses/by/4.0/
Continuous-wave laser
Frequency detuning
Linear coupling
Microelectromechanical systems
Nonlinear dynamics
Synchronization
Synchronization in Coupled Opto-thermal Silicon MEMS Limit Cycle Oscillators
dissertation or thesis
https://newcatalog.library.cornell.edu/catalog/15578732
application/pdf
Theoretical and Applied Mechanics
Cornell University
Doctor of Philosophy
Ph. D., Theoretical and Applied Mechanics
https://hdl.handle.net/1813/59810.2
Publication
Cornell Theses and Dissertations
Bhaskar, Aditya
5893a6ea-7af3-41d7-abc6-04bcd26ab5df
open.access
open.access
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<Abstract>Micro- and nano-scale oscillators exhibit nonlinear phenomena such as limit cycle oscillations, self-synchronization, and frequency entrainment to an external drive. In this work, we chart the behavior of silicon MEMS oscillators that are nominally 40 µm long and 205 nm thick, mechanically coupled, and opto-thermally driven by a continuous-wave helium-neon laser. Experimentally, we demonstrate synchronization in pairs of coupled oscillators which result in reduced frequency fluctuations in the devices. Irregular oscillations are observed at higher input laser powers and are explained by the existence of bistable states and sensitive dependence on initial conditions in the corresponding lumped-parameter mathematical model. The key parameters studied in this work are frequency detuning, coupling level, and the input laser power. Using numerical and analytical perturbation methods, we extend the analysis to an array of eight coupled oscillators and study self-synchronization and frequency entrainment to an external inertial drive. Key contributions include the mapping of the dynamical behavior of clamped-clamped silicon structures widely used in MEMS sensors, actuators, and time-keeping devices, and the use of a third-order model to give numerical and theoretical boundaries for self-synchronization, entrainment, and bistability.</Abstract>
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