eCommons

 

Design And Characterization Of Nanoelectromechanical Switches

Other Titles

Abstract

With the scaling down of electromechanical switches to from micro- to nano-scale, short-range forces like Casimir and van der Waals become more influential. These short range forces can significantly modify the static and dynamic behavior of the switches. In this study, the influence of these short-range forces on cantilever and fixed-fixed type nanoelectromechanical (NEM) switches are investigated. Results from analytical and finite element modeling show that the pull-in parameters and the switching and release behaviors of compliant switches are more affected by the shortrange forces. Dynamic simulations show that NEM switches are vulnerable to stiction. Using smart geometry and electrode configurations it is possible to overcome stiction at the expense of a more complex design and higher pull-in voltage. Finally a memory element and electric field sensor are discussed as promising applications of these switches.

Journal / Series

Volume & Issue

Description

Sponsorship

Date Issued

2009-10-09T13:39:57Z

Publisher

Keywords

Location

Effective Date

Expiration Date

Sector

Employer

Union

Union Local

NAICS

Number of Workers

Committee Chair

Committee Co-Chair

Committee Member

Degree Discipline

Degree Name

Degree Level

Related Version

Related DOI

Related To

Related Part

Based on Related Item

Has Other Format(s)

Part of Related Item

Related To

Related Publication(s)

Link(s) to Related Publication(s)

References

Link(s) to Reference(s)

Previously Published As

Government Document

ISBN

ISMN

ISSN

Other Identifiers

Rights

Rights URI

Types

dissertation or thesis

Accessibility Feature

Accessibility Hazard

Accessibility Summary

Link(s) to Catalog Record