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HETEROGENOUS INTEGRATION FOR CELL-SIZED INTEGRATED SYSTEMS

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2025-09-05
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In this thesis, we introduce the concept of cell-sized integrated systems. These systems are created by integrating dissimilar micro-devices, offering diverse functionalities akin to those of macro-scale systems but scaled down to the size of a single cell. The two primary types of cell-sized integrated systems are micro neural implants and omni-enviro autonomous micro-robots, creating both of which face distinct challenges. The creation of micro-neural implants is limited by constraints in manufacturing technology, requiring a universal method to combine various functional microscale devices. The challenge in developing omni-enviro autonomous microrobots lies in the absence of certain components: high-efficiency micro-actuators that can operate in all environments. In this work, I will demonstrate how we overcome these challenges by introducing a heterogeneous integration method for combining disparate microscale devices, and by developing a new type of micro-actuator. After addressing these challenges, I will showcase our advancements towards the goals of creating micro neural implants and autonomous microrobots.

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135 pages

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2023-08

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McEuen, Paul

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Jena, Debdeep
Fuchs, Gregory

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Electrical and Computer Engineering

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Ph. D., Electrical and Computer Engineering

Degree Level

Doctor of Philosophy

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Government Document

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dissertation or thesis

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