eCommons

 

Image Processing to enable Transient Temperature Profiling during Laser Spike Annealing

Other Titles

Abstract

The introduction of high-throughput combinatorial approaches for material discovery and optimization has led to the popularity of Lateral Gradient Laser Spike Annealing (lg-LSA), a rapid thermal annealing technique, which utilize temperature gradients to extract temperature-dependent material properties. This method reduces the need for numerous samples and saves time. Accurate temperature calibration is crucial for lg-LSA's success. Existing methods, such as thermocouples, have limitations that may not suit lg-LSA requirements. To achieve precise spatial and temporal resolution while remaining non-contact and non-destructive, thermoreflectance method is proposed for temperature calibration. This method leverages the linear effect of temperature on surface reflectivity, enabling high-resolution temperature measurements. Absolute calibration points, such as substrate melting points or thin-film phase changes, are used to calibrate the silicon wafer temperature profile using CO2 and diode laser system. Thermoreflectance-based temperature calibration allows for quick parameter tuning, identification of temperature thresholds, and characterization of transitional phases, enabling efficient material characterization and discovery. This approach holds promise for various fields, including electronics, photonics, and photovoltaics, potentially revolutionizing material research and accelerating technological advancements.

Journal / Series

Volume & Issue

Description

93 pages

Sponsorship

Date Issued

2023-08

Publisher

Keywords

laser spike annealing; lg-LSA; temperature calibration; thermoreflectance

Location

Effective Date

Expiration Date

Sector

Employer

Union

Union Local

NAICS

Number of Workers

Committee Chair

Thompson, Michael

Committee Co-Chair

Committee Member

Van Dover, Robert

Degree Discipline

Materials Science and Engineering

Degree Name

M.S., Materials Science and Engineering

Degree Level

Master of Science

Related Version

Related DOI

Related To

Related Part

Based on Related Item

Has Other Format(s)

Part of Related Item

Related To

Related Publication(s)

Link(s) to Related Publication(s)

References

Link(s) to Reference(s)

Previously Published As

Government Document

ISBN

ISMN

ISSN

Other Identifiers

Rights

Rights URI

Types

dissertation or thesis

Accessibility Feature

Accessibility Hazard

Accessibility Summary

Link(s) to Catalog Record