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dc.contributor.authorPancoast, Leanna
dc.date.accessioned2020-08-10T20:07:59Z
dc.date.available2020-08-10T20:07:59Z
dc.date.issued2020-05
dc.identifier.otherPancoast_cornell_0058O_10903
dc.identifier.otherhttp://dissertations.umi.com/cornell:10903
dc.identifier.urihttps://hdl.handle.net/1813/70314
dc.description49 pages
dc.description.abstractThis thesis covers the design, fabrication, and testing of low-power electrostatically actuated MEMS relays. These relays can be used to enable ultra-low power operation of a sensor node while waiting for a signal of interest, significantly increasing the battery life. Electrostatic MEMS relays are fabricated on silicon-on-insulator wafers using a one-mask process with tools available in the Cornell Nanofabrication Facility (CNF). Tests of the fabricated devices are then processed and automated using Python and Arduino technology to control various test equipment. The resulting MEMS relay is able to be actuated using an external sensor.
dc.language.isoen
dc.rightsAttribution-ShareAlike 4.0 International
dc.rights.urihttps://creativecommons.org/licenses/by-sa/4.0/
dc.subjectfabrication
dc.subjectmems
dc.subjectrelays
dc.subjectsemiconductor
dc.titleTHE DESIGN, FABRICATION, AND TESTING OF LOW-POWER MEMS RELAYS
dc.typedissertation or thesis
thesis.degree.disciplineElectrical and Computer Engineering
thesis.degree.grantorCornell University
thesis.degree.levelMaster of Science
thesis.degree.nameM.S., Electrical and Computer Engineering
dc.contributor.chairLal, Amit
dc.contributor.committeeMemberMolnar, Alyosha
dcterms.licensehttps://hdl.handle.net/1813/59810
dc.identifier.doihttps://doi.org/10.7298/vy3k-za06


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