Goblits To Omg: 3D Fabrication Techniques For An Opto-Mechanical Gyroscope
The scope of this dissertation is to discuss the concept and design considerations of a micro-scale mass manufacturable opto-mechanical gyroscope, as well as the considerable fabrication challenges faced in creating a mass manufacturable hemispherical shell resonator that meets all required design constraints. Intensive studies of HNA isotropic etching of Si, and alternative masking schemes were undertaken to reduce anisotropy and roughness. Dopant Enhanced Oxidation schemes are discussed, and toroidal-lip silicon oxide devices for improved optical quality factor are fabricated. Optical sensing of mechanical resonances is seen in air, and verified with Laser Doppler Vibrometry (LDV).
Gyroscope; 3D; MEMS
Bhave, Sunil A.
Pollock, Clifford Raymond; Bindel, David S.
Ph. D., Electrical Engineering
Doctor of Philosophy
dissertation or thesis