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dc.contributor.authorEverhart, Thomas E.en_US
dc.contributor.authorKrusius, J. Peteren_US
dc.contributor.authorFrey, Jeffreyen_US
dc.contributor.authorWolf, Edward D.en_US
dc.contributor.authorAdesida, Ilesanmien_US
dc.contributor.authorEastman, Lester F.en_US
dc.contributor.authorSonek, Gregory J.en_US
dc.contributor.authorBallantyne, Joseph M.en_US
dc.contributor.authorBuhrman, Robert A.en_US
dc.contributor.editorMcConkey, Gladysen_US
dc.date.accessioned2005-11-07T16:39:37Z
dc.date.available2005-11-07T16:39:37Z
dc.date.issued1983en_US
dc.identifier.urihttps://hdl.handle.net/1813/2425
dc.description.abstractIN THIS ISSUE: Submicron Structures: A Microcosm of Modern Engineering /2 Thomas E. Everhart ... Ultrasmall Features: Key to the Future Development of VLSI Technology /7 J. Peter Krusius ... Small-Scale Physics for Large-Scale Electronic Circuits /12 Jeffrey Frey ... Dry Processing: New Techniques for Etching Submicrometer Structures /16 Edward D. Wolf and Ilesanmi Adesida ... New Techniques for Growing Compound Semiconductors /20 Lester F. Eastman ... Microfabrication for Guided Wave Optics /28 Gregory J. Sonek and Joseph M. Ballantyne ... Superconductors in Microstructures /32 Robert A. Buhrman ... Multidisciplinary Research: Key to Progress at NRRFSS /37 ... Register /41 ... Faculty Publications /49en_US
dc.format.extent37076916 bytes
dc.format.mimetypeapplication/pdf
dc.language.isoen_USen_US
dc.publisherInternet-First University Pressen_US
dc.subjectEngineeringen_US
dc.subjectCornell Universityen_US
dc.subjectSubmicronsen_US
dc.subjectMicrostructuresen_US
dc.subjectMaterials Scienceen_US
dc.subjectElectrons, Ions, and Photonsen_US
dc.subjectNanolithographyen_US
dc.subjectMicrophysicsen_US
dc.titleEngineering: Cornell Quarterly, Vol.18, No.3 (Spring 1983-84): Key to New Technologiesen_US
dc.typeperiodicalen_US


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