Design And Characterization Of Nanoelectromechanical Switches

Abstract

With the scaling down of electromechanical switches to from micro- to nano-scale, short-range forces like Casimir and van der Waals become more influential. These short range forces can significantly modify the static and dynamic behavior of the switches. In this study, the influence of these short-range forces on cantilever and fixed-fixed type nanoelectromechanical (NEM) switches are investigated. Results from analytical and finite element modeling show that the pull-in parameters and the switching and release behaviors of compliant switches are more affected by the shortrange forces. Dynamic simulations show that NEM switches are vulnerable to stiction. Using smart geometry and electrode configurations it is possible to overcome stiction at the expense of a more complex design and higher pull-in voltage. Finally a memory element and electric field sensor are discussed as promising applications of these switches.