Study Of Atomic Layer Deposition: Thin Film Continuity And Techniques To Modulate Surface Reactivity
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2016-02-01
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Atomic layer deposition; XPS, LEISS, selective deposition; Thin film continuity
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Engstrom,James R
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Hanrath,Tobias
Schlom,Darrell
Schlom,Darrell
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Chemical Engineering
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Ph. D., Chemical Engineering
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Doctor of Philosophy
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Government Document
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dissertation or thesis